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首页> 外文会议>Metrology, Inspection, and Process Control for Microlithography XX pt.2 >Application of Nano-tips to Cold Field Emission CD-SEM
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Application of Nano-tips to Cold Field Emission CD-SEM

机译：纳米尖端在冷场发射CD-SEM中的应用

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摘要

Experimental nano-tips have shown significant improvements in the resolution performance of a cold field emission critical dimension metrology scanning electron microscope (CD-SEM). Nano-tip electron sources are very sharp electron emitter tips used as a replacement for the conventional tungsten field emission (FE) electron sources. Nano-tips offer higher brightness and smaller electron source size. An electron microscope equipped with nano-tip electron gun can provide images with higher spatial resolution and with better signal-to-noise ratio. This could present a considerable advantage over the current scanning electron microscope electron gun technology if the tips are sufficiently long-lasting and stable for practical use. In this study, an old cold field emission critical dimension CD-SEM was used as an experimental test platform. Substitution of tungsten nano-tips for the regular cathodes required modification of the electron gun circuitry, tip mounting and preparation of nano-tips that properly fit the electron gun assembly. The images taken with experimental nano-tips showed a minimum two-fold improvement in resolution performance than the specification of the test SEM. The lifetime and stability of the nano-tip electron gun was excellent, the tip stayed useful for high-resolution imaging during many days of tests without flashing. The tip lifetime was found to be over a year. This paper summarizes the current state of the work and points to future possibilities that will open when electron guns can be designed to fully take the advantage of the nano-tip electron emitters.
机译：实验性纳米尖端已显示出冷场发射临界尺寸计量扫描电子显微镜（CD-SEM）的分辨率性能有了显着提高。纳米尖端电子源是非常尖锐的电子发射器尖端，可替代常规钨场发射（FE）电子源。纳米尖端提供更高的亮度和更小的电子源尺寸。配备纳米尖端电子枪的电子显微镜可以提供具有更高空间分辨率和更好信噪比的图像。如果尖端足够长并且对于实际使用而言是稳定的，则与当前的扫描电子显微镜电子枪技术相比，这可能会带来相当大的优势。在这项研究中，旧的冷场发射临界尺寸CD-SEM被用作实验测试平台。用钨纳米尖端代替常规阴极需要对电子枪电路进行修改，尖端安装以及制备适合电子枪组件的纳米尖端。与实验SEM的规格相比，使用实验性纳米尖端拍摄的图像显示出至少2倍的分辨率提高。纳米尖端电子枪的寿命和稳定性都非常出色，在许多测试中，尖端在没有闪烁的情况下仍可用于高分辨率成像。发现烙铁头的使用寿命超过一年。本文总结了工作的当前状态，并指出了可以设计电子枪以充分利用纳米尖端电子发射器优势的未来可能性。

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