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Characterization of Contour Shapes Achievable with a MEMS Deformable Mirror

机译：MEMS变形镜可实现轮廓形状的表征

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An important consideration in the design of an adaptive optics controller is the range of physical shapes required by the DM to compensate the existing aberrations. Conversely, if the range of surface shapes achievable with a DM is known, its suitability for a particular AO application can be determined. In this paper, we characterize one MEMS DM that was recently developed for vision science applications. The device has 140 actuators supporting a continuous face sheet deformable mirror having 4mm square aperture. The total range of actuation is about 4μm, achieved using electrostatic actuation in an architecture that has been described previously. We incorporated the MEMS mirror into an adaptive optics (AO) testbed to measure its capacity to transform an initially planar wavefront into a wavefront having one of thirty-six orthogonal shapes corresponding to the first seven orders of Zernike polynomials. The testbed included a superluminescent diode source emitting light with a wavelength 630nm, a MEMS DM, and a Shack Hartmann wavefront sensor (SHWS). The DM was positioned in a plane conjugate to the SHWS lenslets, using a pair of relay lenses. Wavefront slope measurements provided by the SHWS were used in an integral controller to regulate DM shape. The control software used the difference between the the wavefront measured by the SHWS and the desired (reference) wavefront as feedback for the DM. The DM is able to produce all 36 terms with a wavefront height root mean square (RMS) from 1.35μm for the lower order Zernike shapes to 0.2μm for the 7th order.
机译：自适应光学控制器设计中的重要考虑因素是DM补偿现有像差所需的物理形状范围。相反，如果已知可通过DM实现的表面形状范围，则可以确定其对特定AO应用的适用性。在本文中，我们描述了一种最近为视觉科学应用开发的MEMS DM。该装置具有140个致动器，用于支撑具有4mm方形孔径的连续面板可变形镜。在以前已经描述过的架构中，使用静电致动可实现总致动范围约为4μm。我们将MEMS反射镜整合到自适应光学（AO）测试台中，以测量其将最初的平面波阵面转换为具有与Zernike多项式的前七个阶相对应的36种正交形状之一的波阵面的能力。测试台包括一个发出波长630nm的光的超发光二极管源，一个MEMS DM和一个Shack Hartmann波前传感器（SHWS）。使用一对中继透镜将DM定位在与SHWS小透镜共轭的平面上。 SHWS提供的波前斜率测量值用于集成控制器中以调节DM形状。控制软件使用SHWS测量的波前与所需（参考）波前之间的差异作为DM的反馈。 DM能够产生所有36个波前高度均方根（RMS）的项，从低阶Zernike形状的1.35μm到第七阶的0.2μm。

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