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首页> 外文会议>Microelectronics Technology and Devices-SBMicro 2008 >Thermal Oxide Passivation by Corona Charges
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Thermal Oxide Passivation by Corona Charges

机译：电晕电荷对热氧化物的钝化

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摘要

High quality oxidation, following the same steps usually employed in the fabrication of high efficiency silicon solar cells in open tube furnaces (tube pre-cleaning, ramps at low temperatures, oxidation in TCA ambient, etc.), were produced on high quality FZ and Cz, p-type, silicon samples in order to investigate the passivation effect of corona charges deposited over their front and rear surfaces. The samples were characterized, before and after this passivation process, by means of lifetime measurements, using the WCT-100 lifetime tester apparatus, in a wide range of injection levels (from 0 to 1000 suns), allowing the extraction of recombination parameters and bulk properties of the wafers.rnWe have not found any significant difference in results when compared to other, more complex and expensive, passivation schemes, like forming gas annealing (FG annealing) and aluminum annealing (alneal).
机译：在高品质FZ和FZ上进行高质量氧化，遵循在开管炉中通常使用的高效硅太阳能电池制造中相同的步骤（管预清洁，低温升温，在TCA环境中氧化等）。 Cz，p型硅样品，以研究沉积在其前表面和后表面上的电晕电荷的钝化效果。在钝化处理之前和之后，使用WCT-100寿命测试仪通过寿命测量来表征样品，并在很宽的注入水平范围内（从0到1000个日照）进行提取，从而可以提取重组参数和大量样品与其他更复杂，更昂贵的钝化方案（如形成气体退火（FG退火）和铝退火（退火））相比，我们在结果上没有发现任何显着差异。

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  • 来源
  • 会议地点 Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR)
  • 作者

    C. A. S. Ramos; M. Cid; R. K. Onmori; N. Stem;

  • 作者单位

    Laboratorio de Microeletronica - Departamento de Engenharia de Sistemas Eletronicos, Escola Politecnica da Universidade de Sao Paulo (EPUSP) Av. Prof. Luciano Gualberto, trav. 3, n° 158, Sao Paulo/SP, Zip Code 05508-900, Brazil;

    Laboratorio de Microeletronica - Departamento de Engenharia de Sistemas Eletronicos, Escola Politecnica da Universidade de Sao Paulo (EPUSP) Av. Prof. Luciano Gualberto, trav. 3, n° 158, Sao Paulo/SP, Zip Code 05508-900, Brazil;

    Laboratorio de Microeletronica - Departamento de Engenharia de Sistemas Eletronicos, Escola Politecnica da Universidade de Sao Paulo (EPUSP) Av. Prof. Luciano Gualberto, trav. 3, n° 158, Sao Paulo/SP, Zip Code 05508-900, Brazil;

    Laboratorio de Microeletronica - Departamento de Engenharia de Sistemas Eletronicos, Escola Politecnica da Universid;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 微电子学、集成电路（IC）;
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