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首页> 外文会议>Micromachining and Microfabrication Process Technology XI >Nanofabrication of Electrochemical Planar Probes for Single Cell Analysis
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Nanofabrication of Electrochemical Planar Probes for Single Cell Analysis

机译：用于单细胞分析的电化学平面探针的纳米加工

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Needle shaped probes with a dual electrode system in submicron size have been developed for electrochemical analyses of living single cells. The probe system is designed for local probing of the cytosolic cell environment and cell organelles using amperometric, potentiometric and impedance spectroscopic methods. Silicon nitride cantilevers with an electrode metal layer system are fabricated on four-inch wafers using conventional micro fabrication techniques. The probe needle structures with a tip in sub micron scale are patterned using Focus Ion Beam (FIB) technology. A focused ion beam is utilized to write the probe needle shape into the pre-shaped cantilever and, for a dual electrode system, the probe is divided into two parts to create two separate electrodes. Subsequently, the needle structures are released from the supporting bulk silicon during a wet etching step, and a silicon nitride layer is deposited to isolate and embed the electrode metal layer. Finally, FIB milling is used for a precise exposure of the buried metal layer by cutting the top of the tip. Electrochemical characterization of nano-probes showed full functionality of Ag/AgCl as well as of platinum transducer systems. The sharpness of the probe tip with a radius of smaller than 50nm and the mechanical robustness of the needle structure allow for a reliable penetration of cell membranes. Initial measurements of cell membrane potentials and cell membrane impedances of rat fibroblast cells using Ag/AgCl transducer probes demonstrate the analytical capability of these probes in biological environments.
机译：具有亚微米尺寸的双电极系统的针状探针已被开发用于活细胞的电化学分析。该探针系统设计用于使用安培法，电位计和阻抗谱法对胞质细胞环境和细胞器进行局部探测。使用常规的微制造技术，在四英寸晶片上制造具有电极金属层系统的氮化硅悬臂。使用聚焦离子束（FIB）技术对具有亚微米级尖端的探针结构进行构图。利用聚焦的离子束将探针的针形写入预成形的悬臂，对于双电极系统，将探针分为两部分以创建两个独立的电极。随后，在湿法蚀刻步骤期间，将针结构从支撑体硅释放，并且沉积氮化硅层以隔离并嵌入电极金属层。最后，FIB铣削用于通过切割尖端的顶部来精确暴露埋入的金属层。纳米探针的电化学表征显示出Ag / AgCl以及铂传感器系统的全部功能。半径小于50nm的探针尖端的锐度和针头结构的机械强度可确保细胞膜的可靠穿透。使用Ag / AgCl换能器探针对大鼠成纤维细胞的细胞膜电位和细胞膜阻抗进行的初步测量证明了这些探针在生物环境中的分析能力。

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