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Confocal operation in differential phase interference microscopy

机译:相位差显微镜中的共焦操作

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Abstract: This paper discusses the operation and imaging properties of various types of optical heterodyne interferometer. Conditions needed to achieve confocality in differential interference microscopes are considered. This leads to a novel extended focus phase imaging mode. Results are presented which demonstrate this mode of operation and show the ability of the technique to produce accurate phase measurement on samples with warp and tilt, over a range much greater than the depth of focus of the objective lens. !11
机译:摘要:本文讨论了各种类型的光学外差干涉仪的操作和成像特性。考虑在微分干涉显微镜中达到共聚焦所需的条件。这导致了新颖的扩展聚焦相位成像模式。给出的结果证明了这种操作模式,并表明了该技术能够在比物镜的聚焦深度大得多的范围内对具有翘曲和倾斜的样品进行精确的相位测量。 !11

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