This initial assessment of immersion industrialization and the possible 'plunge and play' into a manufacturing environment for C065 process shows that immersion technology is still not fully matured and thus cannot be implemented into the C065 process at this time. On the positive side is the imaging performance, but the negatives of defectivity, overlay, and most COO (not discussed in this paper) are strong indicators that the process is still very much in a R&D phase. We are confident that progress is being made and will be seen for the C045 node. In this work, no process optimization was undertaken to improve the defectivity performance. This level of work will be undertaken in the next steps of immersion development.
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