• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Practical holography XXV: materials and applications >Phase shifting holographic interferometer for precise alignment measurements in packaging applications
【24h】

Phase shifting holographic interferometer for precise alignment measurements in packaging applications

机译：相移全息干涉仪，用于包装应用中的精确对准测量

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

One of the main challenges in optoelectronic and photonic applications is the alignment accuracy after bonding of the components is completed, especially if there are multiple single-mode alignments. Advanced applications often require positioning accuracy of these components to be within a sub-micron range in order to avoid unacceptable signal degradation. Also, there is a concern about the effects of certain processing techniques on component integrity. In all cases, the extent to which a package is affected can only be evaluated by a measurement approach that allows detecting misalignments/deformations on the order of lOnm. Unfortunately, many conventional techniques are virtually useless when measurements are performed on diffuse objects, such as photonic packages. These limitations can be avoided using holography, which facilitates recording and reconstruction of the optical waves reflected from any surface. In the process of reconstruction it is possible to reproduce not only the amplitude of the reflected wave, but also its phase distribution, which carries information about the distance to each point illuminated with light. An optical technique developed by our group and presented in this paper is based on a holographic approach and combines the principles of holographic interferometry and phase modulating adaptive optics.
机译：光电和光子应用中的主要挑战之一是完成元件键合后的对准精度，尤其是在存在多个单模对准的情况下。先进的应用程序通常要求这些组件的定位精度在亚微米范围内，以避免信号质量下降。同样，人们担心某些处理技术对组件完整性的影响。在所有情况下，包装的影响程度只能通过一种测量方法来评估，该方法允许检测大约10nm的未对准/变形。不幸的是，当对诸如光子封装之类的散射物体进行测量时，许多常规技术实际上是无用的。使用全息图可以避免这些局限性，全息图有助于记录和重建从任何表面反射的光波。在重建过程中，不仅可以复制反射波的振幅，还可以复制其相位分布，该相位分布携带有关到每个被光照射的点的距离的信息。我们小组开发并在本文中介绍的一种光学技术是基于全息方法，并结合了全息干涉测量法和相位调制自适应光学原理。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号