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Analysis of variations of the thickness phase objects by lateral shearing interferometry and white light scanning interferometry

机译：通过横向剪切干涉法和白光扫描干涉法分析厚度相位物体的变化

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摘要

The interferometric techniques of lateral shearing and white light scanning interferometry are combined to determine the variations of thickness of phase objects and the thickness of such objects is approximated through B-splines functions.

机译：结合横向剪切干涉技术和白光扫描干涉技术来确定相位对象的厚度变化，并通过B样条函数来估算此类对象的厚度。

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来源
《RIAO/OPTILAS 2004》|2004年|P.657-662|共6页
会议地点 Porlamar (VE)
作者
H. Altamar; A. Plata;
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作者单位

Escuela de Fisica Universidad Industrial de Santer;

Bucaramanga, Apartado 678, Colombia;

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会议组织
原文格式 PDF
正文语种 eng
中图分类应用光学;
关键词
white light interferometry; lateral shearing interferometry;

机译：白光干涉法;横向剪切干涉法;

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1. Sensitivity analysis of thin-film thickness measurement by vertical scanning white-light interferometry [J] . Jing-tao Dong, Rong-sheng Lu Applied optics . 2012,第23期

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2. Thin film thickness measurements using Scanning White Light Interferometry [J] . B. Maniscalco, P.M. Kaminski, J.M. Walls Thin Solid Films . 2014,第jana1期

机译：使用扫描白光干涉仪测量薄膜厚度
3. Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry [J] . Seung-Woo Kim, Gee-Hong Kim Applied optics . 1999,第28期

机译：白光扫描干涉法测量透明薄膜层的厚度轮廓
4. Analysis of variations of the thickness-phase objects by lateral shearing interferometry and white light scanning interferometry [C] . Hernando R. Altamar, Arturo Plata Iberoamerican Meeting on Optics;Latin American Meeting on Optics, Lasers, and Their Applications;International Commission for Optics Regional Meeting . 2004

机译：横向剪切干涉法和白光扫描干涉法分析厚度相物体的变化
5. Absolute distance (thickness) metrology using wavelength scanning interferometry. [D] . Suratkar, Amit Ravindra. 2009

机译：使用波长扫描干涉仪的绝对距离（厚度）度量衡。
6. Integrated Speckle-Based Displacement Measurement for Lateral Scanning White Light Interferometry [O] . Gert Behrends, Dirk Stöbener, Andreas Fischer 2021

机译：基于横向扫描白色光干涉测量的集成散斑的位移测量
7. Thin film thickness measurements using Scanning White Light Interferometry [O] . Maniscalco Bianca, Kaminski Piotr M., Walls Michael 2014

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8. Coherence Properties of Broadband Optical Fields with Applications to White-Light Shearing Interferometry. [R] . idell,paul s. 1978

机译：宽带光场的相干特性及其在白光剪切干涉测量中的应用。

Analysis of variations of the thickness phase objects by lateral shearing interferometry and white light scanning interferometry

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