Micromechanics based on silicon carbide

著录项

• 来源
  《Silicon carbide and related materials 2012》|2012年|998-1001|共4页
• 会议地点 St. Petersburg(RU)
• 作者

  O.N Astashenkova; A.V. Korlyakov; V.V. Luchinin;

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• 作者单位

  Department of electronics, St. Petersburg state electrotechnical university «LETI», Centre of Microtechnology and Diagnostics, Russia;

  Department of electronics, St. Petersburg state electrotechnical university «LETI», Centre of Microtechnology and Diagnostics, Russia;

  Department of electronics, St. Petersburg state electrotechnical university «LETI», Centre of Microtechnology and Diagnostics, Russia;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  silicon carbide films; micromechanics; mechanical stress; magnetron deposition; mechanical properties;

  机译：碳化硅膜；微力学机械应力磁控管沉积；机械性能;