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Control-systems based analysis and design methods for scanning probe microscopy.

机译：基于控制系统的扫描探针显微镜分析和设计方法。

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摘要

Recent demonstrations of nanoscience provide ample evidence indicating the feasibility of rational control, manipulation and interrogation of matter at the atomic scale. A class of devices, with micro-sized sensor probes, called Scanning Probe Microscopes (SPMs) are in the forefront of the technology that have demonstrated imaging and manipulation of sample properties. However, this technology is still far from realizing the promise of routinely tailoring matter at the atomic scale. Such an ability, once realized, will have far reaching impact and revolutionize every area of science and technology, especially the areas of material science, biology, medicine, and manufacturing.;This thesis presents control systems theoretic analysis and synthesis of new modes of operations that significantly expand the range of performance specifications and capabilities of SPMs. In particular, the focus of this thesis is on the two main requirements of SPMs, the precision positioning of the matter with respect to the probe and the obtaining of the surface topography from the probe data. A characterization of the inherent fundamental trade-offs between resolution, tracking-bandwidth, and reliability specifications on the positioning capability of these devices. A series of control designs which exploit these trade-offs appropriately to achieve pre-specified feasible performance objectives is discussed. These designs have two degrees of freedom (2DOF), that is, have the feedforward and the feedback components, and are obtained using the optimal control framework. Implementations and experimental results on the application of these designs show over 100-300% improvement over competing existing designs. For imaging, control systems tools have been used to model and analyze probe-sample (matter) interactions and design signals that estimate the sample topography. The central concept in this design is to view sample-topography signals as disturbance signals and use system theoretic tools to estimate them. Experiments using these estimate signals show substantial improvements in imaging and detection bandwidths, and fewer artifacts and misinterpretations in SPM imaging.
机译：纳米科学的最新证明提供了充足的证据，表明在原子尺度上对物质进行合理控制，操纵和审讯的可行性。一类带有微型传感器探针的设备被称为扫描探针显微镜（SPM），它已在该技术领域处于领先地位，该技术已证明对样品特性进行成像和处理。但是，这项技术还远没有实现在原子尺度上例行裁量物质的承诺。这种能力一旦实现，将产生深远的影响，并将彻底改变科学技术的各个领域，尤其是材料科学，生物学，医学和制造领域。本论文提出了控制系统的理论分析和新操作模式的综合极大地扩展了SPM的性能规格和功能范围。特别是，本文的重点是对SPM的两个主要要求，即物质相对于探针的精确定位以及从探针数据获得表面形貌。这些设备的定位能力在分辨率，跟踪带宽和可靠性指标之间固有的基本权衡取舍。讨论了一系列控制设计，这些控制设计适当地利用了这些折衷来实现预定的可行性能目标。这些设计具有两个自由度（2DOF），即具有前馈和反馈组件，并使用最佳控制框架获得。这些设计的应用实现和实验结果表明，与竞争性现有设计相比，改进了100-300％。对于成像，控制系统工具已用于对探针-样品（物质）相互作用进行建模和分析，并设计出估计样品形貌的信号。此设计的中心概念是将样品形貌信号视为干扰信号，并使用系统理论工具对其进行估算。使用这些估计信号的实验表明，成像和检测带宽得到了显着改善，SPM成像中的伪像和误解更少。

著录项

  • 作者

    Lee, Chi bum.;

  • 作者单位

    University of Illinois at Urbana-Champaign.;

  • 授予单位 University of Illinois at Urbana-Champaign.;
  • 学科 Engineering Electronics and Electrical.;Physics General.;Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2010
  • 页码 127 p.
  • 总页数 127
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

  • 入库时间 2022-08-17 11:36:56

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