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Nitrogen redistribution in annealed LaFeOxNy thin films investigated by FTIR spectroscopy and EELS mapping

机译:FTIR光谱和EELS映射研究退火的LaFeOxNy薄膜中的氮再分布

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摘要

LaFeOxNy thin films have been deposited by magnetron sputtering in Ar/O-2/N-2 gas mixture at 800 degrees C. Such oxynitride perovskites present a specific infrared vibration mode at 2040 cm(-1), due to the presence of nitrogen, which disappears during heating in air. The loss of the vibration mode with temperature has been monitored allowing the determination of an activation energy of thermal degradation of LaFeOxNy. The quantification of nitrogen by Elastic Recoil Detection Analysis (ERDA) before and after heating exhibits the same nitrogen content. Such behavior is due to a nitrogen redistribution observed by Electron Energy Loss Spectroscopy (EELS) mapping, showing migration of nitrogen into grain boundaries, in association with the film oxidation. (C) 2017 Elsevier B.V. All rights reserved.
机译:LaFeOxNy薄膜已通过磁控溅射在800摄氏度的Ar / O-2 / N-2气体混合物中沉积。由于氮的存在,此类氧氮化钙钛矿在2040 cm(-1)处呈现特定的红外振动模式,在空气中加热时消失。已经监测了振动模式随温度的损失,从而可以确定LaFeOxNy的热降解活化能。加热前后,通过弹性反冲检测分析(ERDA)对氮的定量显示相同的氮含量。这种行为归因于通过电子能量损失谱(EELS)映射观察到的氮再分布,这表明氮与薄膜氧化有关的迁移进入晶界。 (C)2017 Elsevier B.V.保留所有权利。

著录项

  • 来源
    《Applied Surface Science》 |2018年第ptab期|1041-1045|共5页
  • 作者单位

    Univ Lorraine, IJL, CNRS, UMR 7198, Parc Saurupt, F-54011 Nancy, France|UNamur, LISE, Dept Phys, 61 Rue Bruxelles, B-5000 Namur, Belgium;

    Univ Lorraine, IJL, CNRS, UMR 7198, Parc Saurupt, F-54011 Nancy, France;

    Univ Lorraine, IJL, CNRS, UMR 7198, Parc Saurupt, F-54011 Nancy, France;

    Univ Lorraine, IJL, CNRS, UMR 7198, Parc Saurupt, F-54011 Nancy, France;

    HZDR, Ion Beam Ctr, Bautzner Landstr 400, D-01328 Dresden, Germany;

    Univ Lorraine, IJL, CNRS, UMR 7198, Parc Saurupt, F-54011 Nancy, France;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Oxynitride perovskite; Thermal stability; EELS mapping; FTIR;

    机译:钙钛矿氧氮化物;热稳定性;EELS图;FTIR;

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