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首页> 外文期刊>International journal of quality, statistics, & reliability >Reliability and Fatigue Analysis in Cantilever-Based MEMS Devices Operating in Harsh Environments
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Reliability and Fatigue Analysis in Cantilever-Based MEMS Devices Operating in Harsh Environments

机译：在恶劣环境下运行的基于悬臂的MEMS器件的可靠性和疲劳分析

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The microelectromechanical system (MEMS) is one of the most diversified fields of microelectronics; it is rated to be the most promising technology of modern engineering. MEMS can sense, actuate, and integrate mechanical and electromechanical components of micro- and nano sizes on a single silicon substrate using microfabrication techniques. MEMS industry is at the verge of transforming the semiconductor world into MEMS universe, apart from other hindrances; the reliability of these devices is the focal point of recent research. Commercialization is highly dependent on the reliability of these devices. MEMS requires a high level of reliability. Several technological factors, operating conditions, and environmental effects influencing the performances of MEMS devices must be completely understood. This study reviews some of the major reliability issues and failure mechanisms. Specifically, the fatigue in MEMS is a major material reliability issue resulting in structural damage, crack growth, and lifetime measurements of MEMS devices in the light of statistical distribution and fatigue implementation of Paris' law for fatigue crack accumulation under the influence of undesirable operating and environmental conditions.
机译：微机电系统（MEMS）是微电子领域中最多样化的领域之一。它被认为是现代工程最有希望的技术。 MEMS可以使用微加工技术在单个硅基板上感应，驱动和集成微米和纳米尺寸的机械和机电组件。除其他障碍外，MEMS工业正处于将半导体世界转变为MEMS领域的边缘。这些设备的可靠性是近期研究的重点。商业化高度依赖于这些设备的可靠性。 MEMS要求高度的可靠性。必须完全了解影响MEMS器件性能的几种技术因素，工作条件和环境影响。这项研究回顾了一些主要的可靠性问题和故障机理。具体来说，MEMS的疲劳是主要的材料可靠性问题，这导致了MEMS器件的结构损坏，裂纹扩展以及寿命测量，这是根据统计分布和在不期望的操作和影响下疲劳裂纹累积的巴黎定律的疲劳实现来实现的。环境条件。

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    Mohammad Tariq Jan; Nor Hisham Bin Hamid; Mohd Haris Md Khir; Khalid Ashraf; Mohammad Shoaib;

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    Department of Electrical and Electronics Engineering, Universiti Teknologi, PETRONAS, 31750 Seri Iskandar, Tronoh, Perak, Malaysia,Department of Physics, Kohat University of Science and Technology (KUST), Kohat 26000, Pakistan;

    Department of Electrical and Electronics Engineering, Universiti Teknologi, PETRONAS, 31750 Seri Iskandar, Tronoh, Perak, Malaysia;

    Department of Electrical and Electronics Engineering, Universiti Teknologi, PETRONAS, 31750 Seri Iskandar, Tronoh, Perak, Malaysia;

    Department of Electrical and Electronics Engineering, Universiti Teknologi, PETRONAS, 31750 Seri Iskandar, Tronoh, Perak, Malaysia;

    Department of Electrical and Electronics Engineering, Universiti Teknologi, PETRONAS, 31750 Seri Iskandar, Tronoh, Perak, Malaysia;

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