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首页> 外文期刊>Journal of Crystal Growth >Characterizations of GaN films and AlGaN/GaN heterostructures on vicinal sapphire (0001) substrates grown by MOCVD
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Characterizations of GaN films and AlGaN/GaN heterostructures on vicinal sapphire (0001) substrates grown by MOCVD

机译:通过MOCVD生长的邻近蓝宝石(0001)衬底上的GaN膜和AlGaN / GaN异质结构的表征

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摘要

GaN films and AlGaN/GaN heterostructures grown on vicinal sapphire (00 01) substrates by metalorganic chemical vapor deposition (MOCVD) are investigated. It is found that surface morphologies of GaN films depend on the vicinal angle, however, they are not sensitive to the inclination directions of the substrate. The optimized vicinal angle for obtaining excellent surface morphology is around 0.5°. This conclusion is also confirmed by characterizing the electrical property of two-dimensional electron gas (2DEG) in the AlGaN/GaN heterostructure.
机译:研究了通过有机金属化学气相沉积(MOCVD)在邻近蓝宝石(00 01)衬底上生长的GaN膜和AlGaN / GaN异质结构。已经发现,GaN膜的表面形态取决于毗连角,但是它们对衬底的倾斜方向不敏感。获得最佳表面形态的最佳邻角约为0.5°。该结论还通过表征AlGaN / GaN异质结构中的二维电子气(2DEG)的电性能得到了证实。

著录项

  • 来源
    《Journal of Crystal Growth》 |2009年第10期|2853-2856|共4页
  • 作者单位

    Energy Semiconductor Electronics Research Laboratory, National Institute of Advanced Industrial Science and Technology (AIST), Umezono 1-1-1, Central 2, Tsukuba-shi, Ibaraki 305-8568, Japan;

    Energy Semiconductor Electronics Research Laboratory, National Institute of Advanced Industrial Science and Technology (AIST), Umezono 1-1-1, Central 2, Tsukuba-shi, Ibaraki 305-8568, Japan;

    Energy Semiconductor Electronics Research Laboratory, National Institute of Advanced Industrial Science and Technology (AIST), Umezono 1-1-1, Central 2, Tsukuba-shi, Ibaraki 305-8568, Japan;

    School of Physics, Peking University, Beijing 100871, PR China;

    School of Physics, Peking University, Beijing 100871, PR China;

    School of Physics, Peking University, Beijing 100871, PR China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    A1. Surface structure; A3. Metalorganic chemical vapor deposition; B1. Nitride;

    机译:A1。表面结构;A3。金属有机化学气相沉积;B1。氮化物;

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