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首页> 外文期刊>Journal of nanomaterials >Regression Analysis of the Effect of Bias Voltage on Nano- and Macrotribological Properties of Diamond-Like Carbon Films Deposited by a Filtered Cathodic Vacuum Arc Ion-Plating Method
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Regression Analysis of the Effect of Bias Voltage on Nano- and Macrotribological Properties of Diamond-Like Carbon Films Deposited by a Filtered Cathodic Vacuum Arc Ion-Plating Method

机译：偏置电压对通过过滤阴极真空电弧离子镀法沉积的类金刚石碳膜的纳米和宏观摩擦学特性影响的回归分析

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摘要

Diamond-like carbon (DLC) films are deposited by bend filtered cathodic vacuum arc (FCVA) technique with DC and pulsed bias voltage. The effects of varying bias voltage on nanoindentation and nanowear properties were evaluated by atomic force microscopy. DLC films deposited with DC bias voltage of -50V exhibited the greatest hardness at approximately 50 GPa, a low modulus of dissipation, low elastic modulus to nanoindentation hardness ratio, and high nanowear resistance. Nanoindentation hardness was positively correlated with the Raman peak ratio I_d/I_g, whereas wear depth was negatively correlated with this ratio. These nanotribological properties highly depend on the films' nanostructures. The tribological properties of the FCVA-DLC films were also investigated using a ball-on-disk test.The average friction coefficient of DLC films deposited with DC bias voltage was lower than that of DLC films deposited with pulse bias voltage. The friction coefficient calculated from the ball-on-disk test was correlated with the nanoindentation hardness in dry conditions. However, under boundary lubrication conditions, the friction coefficient and specific wear rate had little correlation with nanoindentation hardness, and wear behavior seemed to be influenced by other factors such as adhesion strength between the film and substrate.
机译：通过直流和脉冲偏置电压的弯曲过滤阴极真空电弧（FCVA）技术沉积类金刚石碳（DLC）膜。通过原子力显微镜评估了变化的偏置电压对纳米压痕和纳米磨损性能的影响。沉积有-50V直流偏置电压的DLC膜在约50 GPa处表现出最大的硬度，低的耗散模量，低的弹性模量与纳米压痕硬度比以及较高的纳米耐磨性。纳米压痕硬度与拉曼峰比率I_d / I_g正相关，而磨损深度与该比率负相关。这些纳米摩擦学特性高度取决于薄膜的纳米结构。还通过球盘试验研究了FCVA-DLC薄膜的摩擦学性能.DC偏压沉积的DLC薄膜的平均摩擦系数低于脉冲偏压沉积的DLC薄膜的平均摩擦系数。由圆盘试验得出的摩擦系数与干燥条件下的纳米压痕硬度相关。然而，在边界润滑条件下，摩擦系数和比磨损率与纳米压痕硬度几乎没有关系，并且磨损行为似乎受到其他因素的影响，例如薄膜与基材之间的粘合强度。

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