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a-Si : H/a-SiOx : H microcavities with a-Si(Er): H active layer

机译:a-Si:H / a-SiOx:具有a-Si(Er):H活性层的H微腔

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摘要

Fabry-Perot a-Si:H/a-SiOx:H and a-Si(P):H/SnO2 microcavities (MCs) with Er-doped a-Si:H active regions were fabricated by plasma-enhanced chemical vapor deposition. A metalorganic compound was used to incorporate erbium into the active a-Si:H layer. The room temperature transmission. reflection and spontaneous emission spectra of the MCs with two and three pairs of layers in distributed Bragg reflectors were measured. An intensity enhancement by two order of magnitude and selective narrowing of the 1.54 pm erbium emission line were observed as compared to the case of a single a-Si(Er):H film deposited on a quartz substrate. A theoretical analysis of the experimental data is given. (C) 2002 Elsevier Science B.V. All rights reserved. [References: 15]
机译:通过等离子体增强化学气相沉积法制备了带有Er掺杂a-Si:H有源区的Fabry-Perot a-Si:H / a-SiOx:H和a-Si(P):H / SnO2微腔(MCs)。使用金属有机化合物将掺入活性a-Si:H层中。室温传输。测量了分布布拉格反射器中具有两对和三对层的MC的反射光谱和自发发射光谱。与在石英衬底上沉积单个a-Si(Er):H薄膜的情况相比,观察到强度提高了两个数量级,并且选择性缩小了1.54 pm的emission发射线。给出了实验数据的理论分析。 (C)2002 Elsevier Science B.V.保留所有权利。 [参考:15]

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