Nanolithography on SrRuO3 thin film surfaces by scanning tunneling microscopy

Liu Y; Zhang J

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Nanolithography on SrRuO3 thin film surfaces by scanning tunneling microscopy

机译：SrRuO3薄膜表面纳米光刻的扫描隧道显微镜

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Nanolithography on SrRuO3 (SRO) thin film surfaces has been performed by a scanning tunneling microscope under ambient conditions. The depth of etched lines increases with increasing bias voltage but it does not change significantly by increasing the tunneling current. The dependence of line-width on bias voltage from experimental data is in agreement with theoretical calculation based on field-induced evaporation mechanism. Moreover, a three-square nanostructure was successfully created, showing the capability of fabricating nanodevices in SRO thin films.

机译：SrRuO3（SRO）薄膜表面的纳米光刻已通过扫描隧道显微镜在环境条件下进行。蚀刻线的深度随着偏置电压的增加而增加，但是不会随着隧穿电流的增加而明显改变。实验数据表明线宽对偏置电压的依赖性与基于场致蒸发机理的理论计算是一致的。此外，成功创建了一个三平方纳米结构，显示了在SRO薄膜中制造纳米器件的能力。

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《Physica, B. Condensed Matter》 |2010年第7期|共4页
作者
Liu Y; Zhang J;
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正文语种 eng
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关键词
Nanolithography; Scanning tunnelingmicroscope; SrRuO3; Prolate-spheroidal coordinate;

机译：纳米光刻;扫描隧道显微镜;SrRuO3;长椭球坐标;

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1. Nanolithography on SrRuO3 thin film surfaces by scanning tunneling microscopy [J] . Liu Y, Zhang J Physica, B. Condensed Matter . 2010,第7期

机译：SrRuO3薄膜表面纳米光刻的扫描隧道显微镜
2. Study of Resonant Tunneling in Au Nanoclusters on the Surface of Si02/Si Thin Films Using the Combined Scanning Tunneling Microscopy and Atomic-Force Microscopy Technique [J] . M. A. Lapshina, D. O. Filatov, D. A. Antonov, Journal of surface investigation: x-ray, synchrotron and neutron techniques . 2009,第4期

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3. Report on the Studies of the Surfaces of Chemical-Vapor-Deposited (CVD) Thin Diamond Films Conducted by Reflection High-Energy Electron Diffraction (RHEED), Atomic Force Microscopy (AFM), and Scanning Tunneling Microscopy (STM) [J] . Tomohide TAKAMI 東北大学科学計測研究所報告 . 2001,第1期

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4. Characterisation of the surface morphology and electronic structure of YBa_2Cu_3O_(7-x) thin films by atomic force and scanning tunneling microscopies [C] . A G Fitzgerald, Y C Fan, H C Xu, Institute of Physics Electron Microscopy and Analysis Group conference . 1997

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5. Developing alternating current scanning tunneling microscopy and atomic force microscopy to measure thin film properties on the nanoscale. [D] . Szuchmacher, Amy L. 2000

机译：发展交流电扫描隧道显微镜和原子力显微镜以测量纳米级的薄膜特性。
6. Scanning tunnelling spectroscopy of superconductivity on surfaces of LiTi2O4(111) thin films [O] . Yoshinori Okada, Yasunobu Ando, Ryota Shimizu, -1

机译：LiTi2O4（111）薄膜表面超导的扫描隧道光谱
7. Resistive Switching Mechanisms on TaOx and SrRuO3 Thin-Film Surfaces Probed by Scanning Tunneling Microscopy [O] . Moors Marco, Wedig Anja, Bäumer Christoph, 2015

机译：扫描隧道显微镜探测TaOx和srRuO3薄膜表面的电阻切换机制
8. Surface Topography of Pyrolitic Carbons and of Au Thin Films by Scanning Tunneling Microscopy: Grain Boundaries and Surface Defects [R] . Salmeron, M. , Marchon, B. , Ferrer, S. , 1987

机译：通过扫描隧道显微镜观察火成碳和au薄膜的表面形貌：晶界和表面缺陷

Nanolithography on SrRuO3 thin film surfaces by scanning tunneling microscopy

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