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首页> 外文期刊>Crystal Research and Technology: Journal of Experimental and Industrial Crystallography >Raman spectroscopic and X-ray investigation of stressed states in diamond-like carbon films
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Raman spectroscopic and X-ray investigation of stressed states in diamond-like carbon films

机译：类金刚石碳膜应力状态的拉曼光谱和X射线研究

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摘要

The non-destructive characterization of intrinsic stress is very important to evaluate the reliability of devices based on diamond-like carbon (DLC) films. Whereas the only requirement for the X-ray diffraction method is a crystalline state of specimen, Raman spectroscopic stress analysis is restricted to materials showing intensive and sharp Raman peaks. On the other hand, Raman spectroscopy offers the possibility to measure stress profiles with lateral resolution of about 1 micron. The results of stress measurements in DLC films using both X-ray diffraction and Raman spectroscopy are found in very good correspondence. Mean stress in carbon films consisting of very small crystallites on silicon substrates has been determined by measuring and fitting the stress profiles in the substrate near artificial vertical film edges.
机译：固有应力的非破坏性表征对于评估基于类金刚石碳（DLC）膜的器件的可靠性非常重要。 X射线衍射方法的唯一要求是试样的结晶状态，而拉曼光谱应力分析仅限于显示强烈且尖锐的拉曼峰的材料。另一方面，拉曼光谱法提供了以约1微米的横向分辨率测量应力分布的可能性。发现使用X射线衍射和拉曼光谱法在DLC薄膜中进行应力测量的结果非常吻合。通过测量并拟合人造垂直膜边缘附近的基板中的应力分布，可以确定由硅基板上的非常小的微晶组成的碳膜的平均应力。

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