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首页> 外文期刊>The European physical journal, D. Atomic, molecular, and optical physics >On improved understanding of plasma-chemical processes in complex low-temperature plasmas
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On improved understanding of plasma-chemical processes in complex low-temperature plasmas

机译：提高复合低温等离子体中等离子体化学过程的改进

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Over the last years, chemical sensing using optical emission spectroscopy (OES) in the visible spectral range has been combined with methods of mid infrared laser absorption spectroscopy (MIR-LAS) in the molecular fingerprint region from 3 to 20 p,m, which contains strong rotational vibrational absorption bands of a large variety of gaseous species. This optical approach established powerful in situ diagnostic tools to study plasma-chemical processes of complex low-temperature plasmas. The methods of MIRLAS enable to detect stable and transient molecular species in ground and excited states and to measure the concentrations and temperatures of reactive species in plasmas. Since kinetic processes are inherent to discharges ignited in molecular gases, high time resolution on sub-second timescales is frequently desired for fundamental studies as well as for process monitoring in applied research and industry. In addition to high sensitivity and good temporal resolution, the capacity for broad spectral coverage enabling multicomponent detection is further expanding the use of OES and MIR-LAS techniques. Based on selected examples, this paper reports on recent achievements in the understanding of complex low-temperature plasmas. Recently, a link with chemical modeling of the plasma has been provided, which is the ultimate objective for a better understanding of the chemical and reaction kinetic processes occurring in the plasma.
机译：在过去几年中，使用光谱范围中的光发射光谱（OES）的化学感测与分子指纹区域中的中红外激光吸收光谱（MIR-LAS）的方法组合，其中包含3至20 p，m，其中含有强大的旋转振动吸收带的各种气态。该光学方法建立了强大的原位诊断工具，以研究复合低温等离子体的等离子体化学过程。 Mirlas的方法能够检测地面和激发状态下的稳定和瞬时分子物质，并测量等离子体中反应性物种的浓度和温度。由于动力学过程是固有的分子气体点燃的放电，因此对于基本研究以及应用研究和工业的过程监测，通常需要对次秒时间测量值的高时间分辨率。除了高灵敏度和良好的时间分辨率之外，可以实现多组分检测的广谱覆盖的容量还在扩大OES和MIR-LAS技术的使用。根据选定的例子，本文报告了近期了解复杂低温等离子体的成就。最近，已经提供了一种具有等离子体的化学建模的链接，这是更好地理解在等离子体中发生的化学和反应动力学过程的最终目标。

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