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首页> 外文期刊>Bulletin of Materials Science >Structural and optical characterization of thick and thin poly crystalline diamond films deposited by microwave plasma activated CVD
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Structural and optical characterization of thick and thin poly crystalline diamond films deposited by microwave plasma activated CVD

机译：微波等离子体活化CVD沉积的厚和薄多晶金刚石薄膜的结构和光学特性

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摘要

Preliminary results of growth of thin diamond film in a recently installed 3 kW capacity microwave plasma activated CVD (MW-PACVD) system are being reported. The films were deposited on Si (100) substrate at 850° C using methane and hydrogen mixture at 1-5 kW MW power. The grown polycrystalline films were characterized by micro-Raman, transmission electron microscope (TEM), spectrophotometer and atomic force microscope (AFM). The results were compared with that of a thicker diamond film grown elsewhere in a same make MW-PACVD system at relatively higher power densities. The presence of a sharp Raman peak at 1332 cm-1 confirmed the growth of diamond, and transmission spectra showed typical diamond film characteristics in both the samples. Typical twin bands and also a quintuplet twinned crystal were observed in TEM, further it was found that the twinned region in thin sample composed of very fine platelet like structure.
机译：据报道，在最近安装的容量为3 kW的微波等离子体激活CVD（MW-PACVD）系统中，金刚石薄膜生长的初步结果。使用1-5 kW MW功率的甲烷和氢气混合物，在850°C下将膜沉积在Si（100）衬底上。通过微拉曼，透射电子显微镜（TEM），分光光度计和原子力显微镜（AFM）对生长的多晶薄膜进行了表征。将结果与在相同功率的MW-PACVD系统中在其他地方生长的较厚金刚石膜的结果进行了比较。在1332 cm-1处存在一个尖锐的拉曼峰，这证实了金刚石的生长，并且透射光谱在两个样品中均显示出典型的金刚石膜特性。在TEM中观察到典型的孪生带以及五重孪晶，进一步发现薄样品中的孪晶区域由非常细的片状结构组成。

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