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STATISTICAL ANALYSIS METHOD FOR TECHNOLOGICAL PARAMETERS OF GaN DEVICES BASED ON LARGE-SIGNAL EQUIVALENT CIRCUIT MODEL

机译:基于大信号等效电路模型的GaN器件技术参数统计分析方法

摘要

A statistical analysis method for technological parameters of GaN devices based on equivalent circuit model is provided. The analysis method includes the following steps: establishing a GaN device small-signal equivalent circuit model, and extracting small-signal model parameters; establishing a GaN device large-signal equivalent circuit model, and extracting large-signal model parameters; tuning and optimizing the large-signal model parameters by targeting the measured microwave characteristics of the device; and extracting technological parameters of GaN devices in multiple batches based on the established large-signal model, and statistically analyzing the technological parameters. In the method for statistically analyzing technological parameters of GaN devices, first, a GaN device small-signal equivalent circuit model is established, a GaN device large-signal equivalent circuit model associated with technological parameters is then established, and the statistical distribution of the technological parameters is eventually obtained by modeling of devices in multiple batches.
机译:提供了一种基于等效电路模型的GaN器件工艺参数统计分析方法。该分析方法包括以下步骤:建立GaN器件小信号等效电路模型,提取小信号模型参数。建立GaN器件大信号等效电路模型,提取大信号模型参数;通过瞄准设备的微波特性来调整和优化大信号模型参数;基于建立的大信号模型,分批提取GaN器件工艺参数,并对工艺参数进行统计分析。在对GaN器件工艺参数进行统计分析的方法中,首先,建立GaN器件小信号等效电路模型,然后建立与工艺参数相关的GaN器件大信号等效电路模型,并对工艺进行统计分布。最终通过对设备进行多批次建模来获得参数。

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