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Wafer of macro inspection method and automatic wafer macro inspection equipment
Wafer of macro inspection method and automatic wafer macro inspection equipment
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机译：晶圆宏观检测方法及自动晶圆宏观检测设备
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摘要
PROBLEM TO BE SOLVED: To automate the visual test of a pattern on a wafer. SOLUTION: The automatic macro tester comprises an image detector 16 having a poor-resolution tester 10, coat/poor-development tester 12 and defect tester 14, and image processor 18. The tester 10 is to detect a poor resolution of a pattern. The tester 12 is to detect a poor coat and poor development of the pattern. The tester 14 is to detect the presence or absence of a defect in the pattern. The images detected by the testers 10, 12, 14 are sent to the processor 18 for processing the images to judge the pattern whether good or not from the processing result.
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