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首页> 外文会议>International Symposium on Rapid Thermal and Other Short-Time Processing Technologies, May 14-18, 2000, Toronto, Canada >ASPECTS OF ENHANCED TITANIUM SALICIDE FORMATION
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ASPECTS OF ENHANCED TITANIUM SALICIDE FORMATION

机译：增强钛硅化物形成的方面

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Recently, the formation of the C54-TiSi_2 phase has been shown to be significantly enhanced by the addition of small amounts of refractory metal (Rm = Mo, Ta, Nb, ..). In this work, previously proposed models for the increased nucleation density of the C54 phase were specifically tested using UHV deposition and ex-situ RTA techniques. A correlation was found between the nucleation temperature of the C54-TiSi_2 phase and the grain size of the C49-TiSi_2 layer, independent of whether Rm was present. These results are suggestive that the primary mechanism for the enhanced formation of the C54 phase by refractory metals is through a change (retardation) of the Ti silicide reaction kinetics.
机译：近来，已显示出通过添加少量的难熔金属（Rm ＝ Mo，Ta，Nb，..）显着增强了C54-TiSi_2相的形成。在这项工作中，使用UHV沉积和非原位RTA技术专门测试了先前提出的C54相成核密度增加的模型。发现C54-TiSi_2相的成核温度与C49-TiSi_2层的晶粒尺寸之间存在相关性，与Rm是否存在无关。这些结果表明，难熔金属增强C54相形成的主要机理是通过改变（延迟）钛硅化物的反应动力学。

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