首页> 外文会议>MEMS, MOEMS, and Micromachining II >The PDMS micro valve driven by PZT piezoelectric actuator on the silicon wafer

【24h】

The PDMS micro valve driven by PZT piezoelectric actuator on the silicon wafer

机译：PZT压电执行器在硅片上驱动的PDMS微阀

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

Microfluidic components are basic tools in microanalysis systems. A simple structure PDMS micro valve is described. Driven by the PZT piezoelectric actuator, this microvalve could realize to control the liquid flow rate in the microliter or submilliliter scale. The fabrication method about the PZT piezoelectric thick film with the screening printing technique and the Polydimethylsiloxane (PDMS) valve body with the soft lithography technique are presented. The optimal PZT film processing annealing temperature parameter at 800℃ in 60 min could be observed, the PZT grain size is about 1 μm or more. Then the silicone substrate and the drilled PDMS top substrate are bonded together with the oxygen plasm to form the chamber. The overall dimensions of the valve are 10mm*10mm*2mm. While the dead volume is 0.1 ml, and the inner diameter of the valve seat is 6 mm. Finally, the performance of the PDMS valve is tested.

机译：微流体组件是微分析系统中的基本工具。描述了一种简单结构的PDMS微型阀。该微阀由PZT压电致动器驱动，可实现以微升或亚毫升级控制液体流速。提出了采用丝网印刷技术制备PZT压电厚膜和采用软光刻技术制备聚二甲基硅氧烷（PDMS）阀体的方法。可以观察到最佳的PZT薄膜加工退火温度参数为800℃，60 min，PZT晶粒尺寸约为1μm或更大。然后，将有机硅基板和钻孔的PDMS顶部基板与氧等离子粘合在一起以形成腔室。阀门的整体尺寸为10mm * 10mm * 2mm。死体积为0.1 ml，阀座的内径为6 mm。最后，测试PDMS阀门的性能。

著录项

来源
《MEMS, MOEMS, and Micromachining II》|2006年|P.61860W.1-61860W.6|共6页
会议地点 Strasbourg(FR)
作者
L. Tian; W. Wang; X.W Liu; X.L. Wang; Zh.Y Bao;
展开▼
作者单位

MEMS Center, Harbin Institute of Technology, 92 Xidazhi St. NanGang District, Harbin, China 150001;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类真空电子技术;
关键词
microvalve; PDMS; PZT; MEMS; screening pringting; soft lithography;

机译：微阀； PDMS； PZT； MEMS；筛分；软光刻;

相似文献

外文文献
中文文献
专利

1. DESIGN AND OPTIMIZATION OF MICRO SCANNER DRIVEN BY FOLDED PIEZOELECTRIC UNIMORPH ACTUATORS USING PZT FILMS [J] . HUAJUN FANG, LITIAN LIU, XIAOMING WU Integrated Ferroelectrics . 2005,第1期

机译：PZT膜片对折叠式压电单向致动器驱动的微扫描仪的设计和优化
2. Numerical Investigation and Feasibility Study of a PZT-driven Micro-valve Pulsed-jet Actuator [J] . K. L. Kudar, P. W. Carpenter Flow, Turbulence and Combustion . 2007,第3a4期

机译：PZT驱动微阀脉冲喷射执行器的数值研究和可行性研究
3. Numerical investigation and feasibility study of a PZT-driven micro-valve pulsed-jet actuator [J] . Kudar KL, Carpenter PW Flow, turbulence and combustion . 2007,第3a4期

机译：PZT驱动微阀脉冲喷射执行器的数值研究和可行性研究
4. The PDMS micro valve driven by PZT piezoelectric actuator on the silicon wafer [C] . L. Tian, W. Wang, X.W Liu, Conference on MEMS, MOEMS and Micromachining . 2006

机译：PDMS微阀由PZT压电致动器驱动的硅晶片上
5. Synthesis, fabrication, and characterization of self-exciting, self-sensing PZT/silicon dioxide piezoelectric micro-cantilever sensors [D] . Shen, Zuyan 2006

机译：自激，自感应PZT /二氧化硅压电微悬臂梁传感器的合成，制备和表征
6. Electromechanical properties of pressure-actuated PDMS microfluidic push-down valves [O] . Hao Chen, Wei Gu, Nick Cellar, -1

机译：压力驱动的PDMS微流体下压阀的机电性能
7. Fabrication of PZT actuated cantilevers on silicon-on-insulator wafers for a RF microswitch [O] . Hong Wen Jiang, Paul Kirby, Qi Zhang 2015

机译：在用于RF微开关的绝缘体上硅晶片上制造pZT致动悬臂
8. Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large-stroke PZT Unimorph Actuators [R] . Hishinumat, Yoshikazu, Yang, Eui - Hyeok (EH) 2005

机译：大孔径可变形反射镜，带有转移的单晶硅膜，采用大行程pZT单晶片执行器驱动

The PDMS micro valve driven by PZT piezoelectric actuator on the silicon wafer

摘要

著录项

相似文献

相关主题

期刊订阅