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首页> 外文会议>Micromachining and Microfabrication Process Technology XI >A Polymer-based Fabry-Perot Filter Integrated with 3-D MEMS Structures
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A Polymer-based Fabry-Perot Filter Integrated with 3-D MEMS Structures

机译：集成了3-D MEMS结构的基于聚合物的Fabry-Perot滤波器

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Polymers have been considered as one of the most versatile materials in making optical devices for communication and sensor applications. They provide good optical transparency to form filters, lens and many optical components with ease of fabrication. They are scalable and compatible in dimensions with requirements in optics and can be fabricated on inorganic substrates, such as silicon and quartz. Recent polymer synthesis also made great progresses on conductive and nonlinear polymers, opening opportunities for new applications. In this paper, we discussed hybrid-material integration of polymers on silicon-based microelectromechanical system (MEMS) devices. The motivation is to combine the advantages of demonstrated silicon-based MEMS actuators and excellent optical performance of polymers. We demonstrated the idea with a polymer-based out-of-plane Fabry-Perot filter that can be self-assembled by scratch drive actuators. We utilized a fabrication foundry service, MUMPS (Multi-User MEMS Process), to demonstrate the feasibility and flexibility of integration. The polysilicon, used as the structural material for construction of 3-D framework and actuators, has high absorption in the visible and near-infrared ranges. Therefore, previous efforts using a polysilicon layer as optical interfaces suffer from high losses. We applied the organic compound materials on the silicon-based framework within the optical signal propagation path to form the optical interfaces. In this paper, we have shown low losses in the optical signal processing and feasibility of building a thin-film Fabry-Perot filter. We discussed the optical filter designs, mechanical design, actuation mechanism, fabrication issues, optical measurements, and results.
机译：在制造用于通信和传感器应用的光学设备时，聚合物被认为是最通用的材料之一。它们具有良好的光学透明性，可轻松制造滤光片，透镜和许多光学组件。它们具有可扩展性，并且尺寸与光学要求兼容，并且可以在无机基板（例如硅和石英）上制造。最近的聚合物合成在导电和非线性聚合物方面也取得了长足的进步，为新应用打开了机会。在本文中，我们讨论了聚合物在基于硅的微机电系统（MEMS）器件上的混合材料集成。目的是将已证明的基于硅的MEMS致动器的优势与聚合物的出色光学性能相结合。我们通过基于聚合物的平面法布里-珀罗（Fabry-Perot）滤光片演示了该想法，该滤光片可以通过刮擦驱动执行器自行组装。我们利用制造代工服务MUMPS（多用户MEMS工艺）来证明集成的可行性和灵活性。多晶硅被用作构造3-D框架和执行器的结构材料，在可见光和近红外范围内具有很高的吸收率。因此，先前使用多晶硅层作为光学界面的努力遭受高损耗。我们将有机化合物材料应用于光信号传播路径内的硅基框架上，以形成光接口。在本文中，我们显示了光信号处理中的低损耗以及构建薄膜Fabry-Perot滤波器的可行性。我们讨论了光学滤波器的设计，机械设计，致动机制，制造问题，光学测量和结果。

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