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Microstructure and polarity of epitaxial ZnO films grown on LSAT(111) substrate studied by transmission electron microscopy

机译:用透射电子显微镜研究在LSAT(111)衬底上生长的外延ZnO薄膜的微观结构和极性

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摘要

Transmission electron microscopy is used to investigate the structural characteristics of epitaxial ZnO thin films grown on (LaAlO3)(0.3)(Sr0.5Ta0.5O3)(0.7)(111) (LSAT) by rf plasma-assisted molecular beam epitaxy. It is found that the growth temperature plays a key role in the formation of microstructures in ZnO film. Growth temperature dependence of rotation domain, interface and dislocation structures is studied, and the mechanism for polarity selection is discussed. (c) 2005 Elsevier B.V. All rights reserved.
机译:利用透射电子显微镜研究了射频等离子体辅助分子束外延在(LaAlO3)(0.3)(Sr0.5Ta0.5O3)(0.7)(111)(LSAT)上生长的外延ZnO薄膜的结构特征。发现生长温度在ZnO膜的微结构形成中起关键作用。研究了旋转域,界面和位错结构的生长温度依赖性,并讨论了极性选择的机理。 (c)2005 Elsevier B.V.保留所有权利。

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