Characterization of hexagonal diamond thin films synthesized by photo-enhanced chemical vapor deposition method at 450 A degrees C on Al/Ni coated thermally oxidized Si wafer substrates is reported here. Measurements of optical, electrical and mechanical properties of synthesized hexagonal diamond films are reported for the first time. Optical band gap of the hexagonal diamond film is approximately 1.0 eV as obtained from the Tauc plot utilizing UV-Visible spectroscopy. Nanoindenter is utilized for I-V and reduced modulus measurements on the hexagonal diamond films.
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