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Highly parallel fabrication of nanopatterned surfaces with nanoscale orthogonal biofunctionalization imprint lithography

机译:纳米尺度正交生物功能化压印光刻技术的纳米图案表面的高度平行制造

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摘要

Large areas of nanopatterns of specific chemical functionality are needed for biological experiments and biotechnological applications. We present nanoscale orthogonal biofunctionalization imprint lithography (NOBIL), a parallel top-down imprinting and lift-off technique based on step-and-flash imprint lithography (SFIL) that is able to create centimetre-scale areas of nanopatterns of two biochemical functionalities. A photoresist precursor is polymerized with a template in place, and the thin resist layer is etched to create an undercut for lift-off. Gold nano-areas on a silicon dioxide background are then independently functionalized using self-assembly that translates the nanopattern into a cell-adhesive/cell-rejective functionality pattern. We demonstrate the technique by creating fibronectin areas down to a pattern size of 60 nm against a polyethylene glycol (PEG) background, and show initial results of cells stably seeded over an array of 1 mm(2) areas of controlled size and pitch.
机译:生物实验和生物技术应用需要大面积的具有特定化学功能的纳米图案。我们提出了纳米尺度的正交生物功能化刻印光刻技术(NOBIL),这是一种基于步进-闪光刻印光刻技术(SFIL)的平行的自上而下的刻印和剥离技术,能够创建两种生化功能的纳米图案的厘米级区域。光致抗蚀剂前体与原位模板聚合,然后蚀刻薄的抗蚀剂层以形成用于剥离的底切。然后使用自组装将二氧化硅背景上的金纳米区域独立地功能化,该自组装将纳米图案转变成细胞粘附/排斥细胞的功能图案。我们通过创建针对聚乙二醇(PEG)背景的60纳米图案大小的纤连蛋白区域来证明该技术,并显示了稳定地播种在尺寸和间距受控的1 mm(2)区域阵列上的细胞的初步结果。

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