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首页> 外文会议>Conference on MOEMS Display and Imaging Systems, Jan 28-29, 2003, San Jose, California, USA >Nonlinear Dynamics and Control of a Dual-Capacitively Driven Torsional MEMS Scanning Mirror
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Nonlinear Dynamics and Control of a Dual-Capacitively Driven Torsional MEMS Scanning Mirror

机译：双电容驱动扭转MEMS扫描镜的非线性动力学和控制

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摘要

Dual capacitively driven MEMS mirrors, when driven with a sinusoidally varying voltage, will experience a nonlinear torque. Nonlinearities arise from the nonlinear relationship between voltage and torque and the fact that the capacitor gap is a function of the angular displacement of the mirror. At high maximum scan angles, the dynamics of the mirror exhibit behavior similar to that of a nonlinear harmonic oscillator with a softening spring. This behavior is characterized by amplitude instability relative to frequency and results in the need to implement additional control algorithms to achieve stable operation. In this work we present experimental results demonstrating the effects of the nonlinearities and the implications of these nonlinearities for high fidelity image rendering using these scanning mirrors. We then present an analysis of the nonlinearities in the system showing significant nonlinearities up to the 10th order. We present numerical results consistent with the observed behavior of the MEMS scanning mirror. Next, we present an analysis showing that the nonlinearities can be significantly reduced applying a non-sinusoidal voltage signal. Finally, we discuss control issues, solutions and implications for high fidelity image rendering using these scanning mirrors.
机译：当以正弦变化的电压驱动时，双电容驱动的MEMS反射镜将经历非线性转矩。非线性是由于电压和转矩之间的非线性关系以及电容器间隙是反射镜角位移的函数这一事实引起的。在最大的最大扫描角度下，反射镜的动力学特性类似于具有软弹簧的非线性谐波振荡器的特性。这种行为的特征在于幅度相对于频率的不稳定性，并导致需要实施其他控制算法来实现稳定的操作。在这项工作中，我们提供了实验结果，这些结果证明了非线性的影响以及这些非线性对使用这些扫描镜进行高保真图像渲染的影响。然后，我们对系统中的非线性进行了分析，显示出高达10阶的明显非线性。我们提出了与MEMS扫描镜观察到的行为一致的数值结果。接下来，我们进行分析，表明应用非正弦电压信号可以大大降低非线性。最后，我们讨论了使用这些扫描镜进行高保真图像渲染的控制问题，解决方案和含义。

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