首页> 外文会议>International Congress on Applications of Lasers Electro-Optics >FABRICATION OF TWO-LAYER INTEGRATED PHASE MASK AND SINGLE-BEAM, SINGLE EXPOSURE FABRICATION OF 3D PHOTONIC CRYSTAL TEMPLATE USING THE MASK
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FABRICATION OF TWO-LAYER INTEGRATED PHASE MASK AND SINGLE-BEAM, SINGLE EXPOSURE FABRICATION OF 3D PHOTONIC CRYSTAL TEMPLATE USING THE MASK

机译:使用掩模的3D光子晶体模板的两层综合相位掩模和单束,单射线曝光制造的制造

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In this conference, we present a new design and fabrication of an integrated two-layer phase mask for five-beam holographic fabrication of three-dimensional photonic crystal templates. The fabricated phase mask consists of two layers of orthogonally oriented gratings produced in a polymer. The vertical spatial separation between two layers produces a phase shift among diffractive laser beams, which enables the holographic fabrication of inter-connected three-dimensional photonic structures. A three-dimensional photonic crystal template was fabricated using the two-layer phase mask and was consistent with simulations based on the five beam interference. The reported method simplifies the fabrication of photonic crystals and can be integrated with the traditional photolithography.
机译:在本次会议中,我们提出了一种新的设计和制造,用于三维光子晶体模板的五光束全息制造的集成双层相位掩模。制造的相掩模由两层在聚合物中产生的两层正交定向的光栅组成。两层之间的垂直空间分离在衍射激光束之间产生相移,这使得能够与连接的三维光子结构的全息制造。使用双层相位掩模制造三维光子晶体模板,并与基于五光束干扰的模拟一致。报告的方法简化了光子晶体的制造,并且可以与传统光刻集成。

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