首页> 外文会议>Conference on MEMS/MOEMS Technologies and Applications >Electromagnetic MEMs eight-channel variable optical attenuator array
【24h】

Electromagnetic MEMs eight-channel variable optical attenuator array

机译:电磁MEMS八通道可变光衰减器阵列

获取原文

摘要

An eight-channel variable optical attenuator (VOA) array fabricated by MEMS technology is presented. Based on micro electromagnetic actuation, the attenuation level is adjusted by changing the radial offset between the input/output optical fiber. The relationship between the attenuation and the offset was analyzed based on wave-guide transmission theory. The structure parameter was determined through mechanics and magnetic circuit analysis. The device was fabricated and packaged by micromachining technology. The packaged volume of the device is 80?0?2mm3. According to the experiment results, the insertion loss is less than 1dB, the polarization dependent loss is less than 0.1dB, dynamic range is above 35dB and the driving voltage is less than 5V. It is proved to be a low cost, high performance passive device for future all-optical-networks.
机译:提出了由MEMS技术制造的八通道可变光衰减器(VOA)阵列。基于微电磁致动,通过改变输入/输出光纤之间的径向偏移来调节衰减水平。基于波导传输理论分析衰减与偏移之间的关系。通过力学和磁路分析确定结构参数。通过微机械技术制造和包装该装置。设备的包装体积为80?0?2mm3。根据实验结果,插入损耗小于1dB,极化相关损耗小于0.1dB,动态范围高于35dB,驱动电压小于5V。被证明是未来全光网络的低成本,高性能无源设备。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号