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Electromagnetic MEMs eight-channel variable optical attenuator array

机译：电磁MEMs八通道可变光衰减器阵列

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摘要

An eight-channel variable optical attenuator (VOA) array fabricated by MEMS technology is presented. Based on micro electromagnetic actuation, the attenuation level is adjusted by changing the radial offset between the input/output optical fiber. The relationship between the attenuation and the offset was analyzed based on wave-guide transmission theory. The structure parameter was determined through mechanics and magnetic circuit analysis. The device was fabricated and packaged by micromachining technology. The packaged volume of the device is 80x40x12mm~3. According to the experiment results, the insertion loss is less than 1dB, the polarization dependent loss is less than 0.1dB, dynamic range is above 35dB and the driving voltage is less than 5V. It is proved to be a low cost, high performance passive device for future all-optical-networks.
机译：提出了一种采用MEMS技术制造的八通道可变光衰减器（VOA）阵列。基于微电磁致动，通过改变输入/输出光纤之间的径向偏移来调整衰减水平。基于波导传输理论分析了衰减与失调之间的关系。通过力学和磁路分析确定结构参数。该设备是通过微加工技术制造和包装的。设备包装体积为80x40x12mm〜3。根据实验结果，插入损耗小于1dB，偏振相关损耗小于0.1dB，动态范围大于35dB，驱动电压小于5V。对于未来的全光网络，它被证明是一种低成本，高性能的无源设备。

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