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首页> 外文会议>Microelectromechanical structures for materials research >MECHANICAL PROPERTY EVALUATION OF ELECTROPLATED HIGH ASPECT RATIO MICROSTRUCTURES
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MECHANICAL PROPERTY EVALUATION OF ELECTROPLATED HIGH ASPECT RATIO MICROSTRUCTURES

机译：电镀高纵横比显微组织的机械性能评估

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摘要

High aspect ratio microstructures (HARMs) with a height of hundreds of micrometers and a width of a few tens of micrometers present high promise in a number of challenging fields. At LSU, a number of applications are being developed in which nickel HARMs are electroplated on metal surfaces (mold insert fabrication for the LIGA process, HARMs on mechanical seal faces, HARMs on heat exchange surfaces, etc.). In some of these applications, the HARMs are subjected to high stresses and the mechanical properties are particularly important. These properties can be used to adjust processing parameters to optimize properties of the HARMS.rnThis paper presents a method for measuring the strength properties of cantilevered nickel HARMs constructed by LIGA. Experimentally measured values are reported for modulus of rupture (1280 MPa), Young's modulus (153 GPa) and Knoop hardness (500 H_k) for HARMs with an overplated base. SEM micrographs clearly indicate that failure of the beams is brittle and most frequently occurs at the interface of the beam and overplated base.
机译：高纵横比的微结构（HARM）具有数百微米的高度和几十微米的宽度，在许多具有挑战性的领域中都具有很高的前景。在LSU，正在开发许多应用，其中将镍制HARM电镀在金属表面上（用于LIGA工艺的模具嵌件制造，机械密封面上的HARM，热交换表面上的HARM等）。在这些应用中的某些中，HARM承受着很高的应力，机械性能尤为重要。这些性质可用于调整加工参数以优化HARMS的性质。本文提出了一种测量LIGA构造的悬臂镍HARM强度性质的方法。报告了基料过度镀覆的HARM的断裂模量（1280 MPa），杨氏模量（153 GPa）和努氏硬度（500 H_k）的实验测量值。 SEM显微照片清楚地表明，梁的破坏很脆，并且最经常发生在梁和过度镀覆的基体的界面处。

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  • 来源
  • 会议地点 San Francisco CA(US)
  • 作者

    L. S. STEPHENS; K.W. KELLY; E.I. MELETIS; S. SIMHADRI;

  • 作者单位

    Mechanical Engineering Department, Louisiana State University, Baton Rouge, LA 70803;

    Mechanical Engineering Department, Louisiana State University, Baton Rouge, LA 70803;

    Mechanical Engineering Department, Louisiana State University, Baton Rouge, LA 70803;

    Mechanical Engineering Department, Louisiana State University, Baton Rouge, LA 70803;

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  • 正文语种 eng
  • 中图分类 结构;材料;
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