Department of Materials Science and Engineering, Applied Physics, Case Western Reserve University, Cleveland, OH 44106;
Department of Electrical Engineering and Applied Physics, Case Western Reserve University, Cleveland, OH 44106;
Department of Materials Science and Engineering, Applied Physics, Case Western Reserve University, Cleveland, OH 44106;
机译:微加工多晶硅膜中杨氏模量的实验和理论研究
机译:微加工多晶硅膜中杨氏模量的实验和理论研究
机译:杨氏机械谐振器分辨的幼小的模量和β-GA_2O_3薄膜中的相应方向
机译:较年轻的模量,断裂应变和溅射钛薄膜的拉伸强度
机译:通过对基板和系链进行修改,微机械加工的薄膜硅上压电薄膜横向延伸谐振器的性能得到提高。
机译:更正:LiuW.等。基于超高频微机电谐振器的纳米复合聚电解质薄膜涂层的高灵敏度湿度传感器。微型机械20178116
机译:射频溅射玻璃膜在硅微加工中作为保护层和粘结层的新应用