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Cryogenic and high temperature performance of 4H-SiC power MOSFETs

机译:4H-SiC功率MOSFET的低温和高温性能

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The electrical performance of 4H-SiC Power MOSFETs is studied at temperatures from 93K to 473K. With the decrease of operation temperature, the threshold voltage is found to increase linearly whereas the on-resistance shows a minimum value within the whole temperature range. The rapid increase of on-resistance at lower temperature is ascribed to the presence of large densities of interface traps at the SiC/SiO2 interface. In addition, the breakdown voltage is also measured down to 93K and found to increase monotonously with temperature. A set of parameters, determining the breakdown voltage of 4H-SiC MOSFET at different temperatures, is put forward in this paper, by fitting the experimental data.
机译:研究了4H-SiC功率MOSFET在93K至473K温度下的电性能。随着工作温度的降低,发现阈值电压线性增加,而导通电阻在整个温度范围内显示为最小值。较低温度下导通电阻的快速增加归因于SiC / SiO 2 界面处存在大密度的界面陷阱。此外,击穿电压也可低至93K,并随温度单调增加。通过拟合实验数据,提出了确定4H-SiC MOSFET在不同温度下的击穿电压的一组参数。

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