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Dynamics of laser ablation of graphite, Si, and SiC.

机译：石墨，硅和碳化硅的激光烧蚀动力学。

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摘要

The purpose of this study was to investigate the interaction of high-power laser radiation with condensed matter. Specifically, the ablation dynamics of Si, graphite, and SiC were studied. The plasma produced by the laser ablation process was characterized by time-of-flight mass spectrometry and by angle resolved time-of-flight measurements. This characterization was also performed at various laser power densities. From the time-of-flight mass spectrometry measurements, positive ions in the plasma were identified, and the velocities of each were determined. From the angle resolved time-of-flight measurements, the velocity distribution of the expanding plasma and its angular variation was obtained.; Ions in the abated plume were observed to have the most probable speed in the range of 10 ∼ 70 km/s depending on the laser power density. The maximum speeds and intensities were observed at the target normal. While the molecular species were dominant at low laser power density, intensities of the atomic species increased as the laser power density increased. The kinetic energies of both the molecular and atomic species were determined to be in the range of 1 ∼ 2.5 keV.; The material removal rates as a function of the laser power density showed two distinct regimes; higher removal rate at lower laser fluence and lower removal rate at higher laser fluence. This behavior was observed not only from the material removal measurement but also from the integrated ion currents, and these are ascribed to the interaction between the laser radiation and the plasma.
机译：这项研究的目的是研究高功率激光辐射与冷凝物的相互作用。具体地，研究了Si，石墨和SiC的烧蚀动力学。通过飞行时间质谱和角度分辨飞行时间测量来表征由激光烧蚀过程产生的等离子体。还在各种激光功率密度下进行了这种表征。从飞行时间质谱测量中，可以确定等离子体中的正离子，并确定每个离子的速度。从角度分辨的飞行时间测量中，获得了膨胀等离子体的速度分布及其角度变化。根据激光功率密度，观察到烟羽中离子的最可能速度在10〜70 km / s的范围内。在目标法线处观察到最大速度和最大强度。虽然分子种类在低激光功率密度下占主导地位，但原子种类的强度随激光功率密度的增加而增加。测定的分子和原子种类的动能都在1〜2.5keV的范围内。材料去除率随激光功率密度的变化表现出两种不同的状态：在较低的激光通量下，去除率较高；在较高的激光通量下，去除率较低。这种现象不仅从材料去除测量中观察到，而且从积分离子电流中观察到，这些归因于激光辐射与等离子体之间的相互作用。

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  • 作者

    Han, Gyoowan.;

  • 作者单位

    University of Dayton.;

  • 授予单位 University of Dayton.;
  • 学科 Physics Optics.; Engineering Materials Science.; Physics Fluid and Plasma.
  • 学位 Ph.D.
  • 年度 1999
  • 页码 110 p.
  • 总页数 110
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 光学;工程材料学;等离子体物理学;
  • 关键词

  • 入库时间 2022-08-17 11:48:14

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