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Poly-SiGe MEMS actuators for adaptive optics

机译：用于自适应光学的Poly-SiGe MEMS执行器

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摘要

Many adaptive optics (AO) applications require mirror arrays with hundreds to thousands of segments, necessitating a CMOS-compatible MEMS process to integrate the mirrors with their driving electronics. This paper proposes a MEMS actuator that is fabricated using low-temperature polycrystalline silicon-germanium (poly-SiGe) surface-micromaching technology (total thermal budget is 6 hours at or below 425℃). The MEMS actuator consists of three flexures and a hexagonal platform, on which a micromirror is to be assembled. The flexures are made of single-layer poly-SiGe with stress gradient across thickness of the film, making them bend out-of-plane after sacrificial-layer release to create a large nominal gap. The platform, on the other hand, has an additional stress-balancing SiGe layer deposited on top, making the dual-layer stack stay flat after release. Using this process, we have successfully fabricated the MEMS actuator which is lifted 14.6 urn out-of-plane by 290-μm-long flexures. The 2-μm-thick hexagonal mirror-platform exhibits a strain gradient of -5.5x10~(-5) μm~(-1) (equivalent to 18 mm radius-of-curvature), which would be further reduced once the micromirror is assembled.
机译：许多自适应光学（AO）应用需要具有成百上千个段的反射镜阵列，这需要CMOS兼容MEMS工艺将反射镜与其驱动电子设备集成在一起。本文提出了一种MEMS致动器，该致动器是使用低温多晶硅锗（poly-SiGe）表面微加工技术制造的（在425℃或以下时总热预算为6小时）。 MEMS致动器由三个挠曲和一个六角形平台组成，在该平台上将组装一个微镜。挠曲由单层多晶硅制成，在整个膜厚度上具有应力梯度，使它们在牺牲层释放后在平面外弯曲，从而形成较大的标称间隙。另一方面，该平台在顶部沉积了一层额外的应力平衡SiGe层，使双层堆叠在释放后保持平坦。通过这一过程，我们成功地制造出了MEMS执行器，该执行器通过290μm长的挠曲被抬离了平面14.6 um。厚度为2μm的六边形镜平台呈现出-5.5x10〜（-5）μm〜（-1）的应变梯度（等效于18 mm曲率半径），一旦微镜被组装好的。

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