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Design and measurement of MEMS capacitive ultrasonic transducer

机译：MEMS电容超声换能器的设计和测量

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摘要

Since the proposing of capacitive micromachined ultrasonic transducer by Khuri Yakub group in 1994 that this kind of transducer occupying the advantages of wide bandwidth, impedance matching well with the propagation medium especially in fluid and air and high sensitivity, has shown a great potential for a wide range of applications such as medical imaging, medical ultrasound diagnosis, therapy and underwater ultrasonic imaging. This paper presents a kind of MEMS capacitive ultrasonic transducer with the novel cavities embedded in the device layer of Silicon On Insulator. Firstly, the geometric dimensions are derived from the theoretical analysis of the vibrating membrane and the electrical analysis of the transducer. Secondly, Finite Element Analysis is adopted to confirm the operation mode and the deflection and equivalent stress under operation/collapse voltage are obtained. Then, the fabrication process is depicted and the fabricated transducer is shown. The test results show that the electromechanical coupling coefficient is 69.65%.
机译：自1994年Khuri yakub集团提出电容式微机械超声换能器以来，这种传感器占据宽带宽的优点，与传播介质良好的阻抗匹配，特别是在流体和空气中，具有高灵敏度，具有很大的潜力诸如医学成像，医学超声诊断，治疗和水下超声成像等应用范围。本文介绍了一种具有嵌入在绝缘体上硅的装置层中的新型空腔的MEMS电容超声换能器。首先，几何尺寸来自振动膜的理论分析和换能器的电气分析。其次，采用有限元分析来确认操作模式，并获得操作/折叠电压下的偏转和等效应力。然后，描绘了制造过程，并示出了制造的换能器。测试结果表明，机电耦合系数为69.65％。

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