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Design and measurement of MEMS capacitive ultrasonic transducer

机译：MEMS电容超声换能器的设计与测量

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摘要

Since the proposing of capacitive micromachined ultrasonic transducer by Khuri Yakub group in 1994 that this kind of transducer occupying the advantages of wide bandwidth, impedance matching well with the propagation medium especially in fluid and air and high sensitivity, has shown a great potential for a wide range of applications such as medical imaging, medical ultrasound diagnosis, therapy and underwater ultrasonic imaging. This paper presents a kind of MEMS capacitive ultrasonic transducer with the novel cavities embedded in the device layer of Silicon On Insulator. Firstly, the geometric dimensions are derived from the theoretical analysis of the vibrating membrane and the electrical analysis of the transducer. Secondly, Finite Element Analysis is adopted to confirm the operation mode and the deflection and equivalent stress under operation/collapse voltage are obtained. Then, the fabrication process is depicted and the fabricated transducer is shown. The test results show that the electromechanical coupling coefficient is 69.65%.
机译：自从1994年Khuri Yakub小组提出电容式微加工超声换能器以来，这种换能器就具有带宽大，阻抗与传播介质（尤其是在流体和空气中）和高灵敏度匹配等优点，具有广阔的应用前景。应用范围广泛，例如医学成像，医学超声诊断，治疗和水下超声成像。本文提出了一种在新型绝缘体上的器件层中嵌入了新型空腔的MEMS电容式超声换能器。首先，从振动膜的理论分析和换能器的电分析得出几何尺寸。其次，通过有限元分析来确定工作模式，并获得在工作/崩溃电压下的挠度和等效应力。然后，描绘了制造过程并示出了制造的换能器。测试结果表明，机电耦合系数为69.65％。

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